美国MKS*电容压力计   MKS 631系列高温*电容压力计

631d是高温电容压力计，万机仪器过10年前推出RoHS版本。这些器件工作在非常高的内部温度，减少过程的副产物沉积在传感器，它几乎消除了由污染引起的输出漂移。现有的工作温度是150 C或200°°C，允许使用在*苛刻的真空半导体制造过程中如金属蚀刻氮化硅薄膜的化学气相沉积（CVD）。新的包装减少至少40%的所需安装空间量，使它在设计新系统或改造现有的设备更容易。

The 631D is completely self-contained requiring only input power of ±15VDC for operation. No separate electronics modules are used which both reduces the amount of installation space needed and provides better performance due to elimination of noisegenerating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The Type 631D high-performance analog electronics also include fail-safe overtemperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure eliminating the need for vacuum pumps during setpoint adjustment.

该631d是完全独立的，需要±15VDC只有输入功率运行。不使用单独的电子模块，既减少了安装空间的需要和提供更好的性能由于noisegenerating互连电缆的消除。它的铬镍铁合金®传感器提供了非常高的耐腐蚀性，其压等级45磅/平方英寸确保良好的重复性和稳定性无论系统的操作条件。631d型高性能模拟电子还包括安全过热保护和LED状态灯指示其操作状态。一个内部安装的两（2）UL的压力和一个固态跳闸继电器（1）UL批准加热器故障的机电式继电器，是可用的，允许压力控制外部设备或部件。压力脱扣继电器可由用户调整独立在大气压力设定值调整，消除过程中真空泵需要。

美国MKS*电容压力计   MKS 631系列高温*电容压力计Features & Benefits:特点和优点：

•Operating temperatures reduce contamination

•操作温度，减少污染

•Compact design & self-contained electronics save space

•紧凑的设计和完备的电子节省空间

•Inconel® sensor resists corrosion

•Inconel®传感器抗腐蚀

•Insensitive to gas composition

•不敏感的气体组合物

•Performance is unaffected by pressure bursts

•性能不受压力脉冲

•Optional pressure trip relays (2) for controlling external equipment

•可选跳闸继电器（2）控制外部设备

美国MKS*电容压力计   MKS 631系列高温*电容压力计Applications:应用：

The 631D Baratron High Temperature Manometer is found in demanding vacuum processes for semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). It is also an ideal choice for use in biopharmaceutical processing equipment such as lyophilizers and sterilizers that use steam to prevent bacteria growth.

本公司631d高温压力计是发现在苛刻的真空的半导体制造过程，如金属蚀刻氮化硅薄膜的化学气相沉积（CVD）。这也是一个用于生物制药加工设备如机和消毒，使用蒸汽防止细菌生长的理想选择。

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