Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution : 0.05 nm
Position detector noise : < 0.25
nm (bandwidth: 1 kHz)
Out-of-ne motion : < 2 nm
(over 40 µm scan)
Stage
Z stage range : 25 mm
Focus travel range : 15 mm
XY stage travel range : 20 mm x 20 mm
Sample size : Open space up
to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g
Vision
10x (0.21NA) ultra-long working distance lens (1µm resolution)
20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm
(with 10× ive lens)
CCD : 1 Mpixel, 5
Mpixel(optional)
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)
XEI
AFM data analysis software
Electronics
Signal processing
ADC : 18 channels
4 high-speed ADC channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096
pixels
Integrated
functions
3 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control
External signal
access
20 ded signal input/output ports
5 TTL outputs : EOF, EOL, EOP,
Modulation, and AC bias
帕克Park NX10原子力显微镜
Park NX10为您带来高纳米级分辨率的数据,值得您信赖、使用和拥有。无论是从样品设定还是到全扫描成像、测量与分析,Park NX10都可以在保证您专注于创新研究工作的同时提供高精度的数据。
The quickest path to innovative research
Park NX10为您带来高纳米级分辨率的数据,值得您信赖、使用和拥有 。无论是样品设定、全扫描成像还是测量与分析,Park NX10都能在每一步为您节约时间,让您可以更加专注于创新研究工作。
Better accuracy means
better data
Park NX10为您带来高纳米级分辨率的数据,值得您信赖、使用和拥有。它是全球一个真正非接触式原子力显微镜,在延长探针使用寿命的同时,还能够良好地保护您的样品不受损坏。此外,柔性解耦XY轴和Z轴扫描器可带来的度和分辨率。
Better accuracy means
better productivity
无论是样品设定、全扫描成像还是测量与分析,Park NX10都能在每一步为您节约时间。用户友好型界面、简易的激光准直系统、自动探针接近以及分析软件都能让您更快的获得研究结果。
Better accuracy means
better research
当您有了更多充足的时间和更的数据,您可以更加专注于创新研究工作。即便是为复杂的项目,Park NX10也能够凭借着众多的测量模式和可定制化设计满足您的所有需求。
2技术信息
Accurate AFM Solutions for General Research
Accurate AFM Measurement with Low Noise Z Detector
Low Noise Z Detector of Park NX10 AFM
Accurate AFM Scan by True Non-Contact™ Mode
·NX平台的关键技术改进和设计特点
·噪声水平为业界低,竞品无法匹敌
·默认的形貌信号
Z轴探测器是全新的NX系列原子力显微镜的核心技术改进。它是Park独创的应变传感器。凭借着0.2埃的低噪声,它一跃成为行业内噪声低的Z轴探测器。低噪声让Z轴探测器可作为默认的形貌信号。通过对比全新的NX系列原子力显微镜与我们前几代的原子力显微镜,我们可以轻易地看到其中的差异。如果Z轴探测器的噪声过高,用户是无法观察到蓝宝石晶片的原子台阶。Park NX系列原子力显微镜的Z轴探测器所发出的高度信号,其噪声水平与Z轴电压形貌相同。
Accurate AFM Scan by True Non-Contact™ Mode
The Best User Convenience by Design
Easy Tip and Sample Exchange
的镜头设计让您能够轻易地从侧面更换新的探针和样品。借助安装悬臂式探针夹头中预先对齐的悬臂,您无需进行繁杂的激光准直工作。
Lightning Fast Automatic Tip Approach
得益于独有的探针样品接近功能,用户无需进行干预操作,且悬臂装载后仅需10秒便可进行扫描。通过监控悬臂对于接近表面的反应,Park NX10能够在悬臂装载后10秒内,让探针自动快速接近样品。正是凭借着高速Z轴扫描器的快速信息反馈和NX电子控制器的低噪声信号处理,NX系列可让探针快速接近样品表面,且无需用户干预。
Easy, Intuitive Laser Beam Alignment
凭借着我们的预准直悬臂架,悬臂在装载时激光便已完成聚焦。并且,自上而下的同轴视角, 让您可以轻松地找到激光光点。由于激光垂直照射在悬臂上,您可以凭直觉旋动两个定位旋钮,将激光光点随着X轴和Y轴移动。这样,您可以在激光准直界面中,轻易地找到激光并将其定位在PSPD上。此时,您只需要稍作调整实现信号的大化,便可开始获取数据。
3原子力显微镜模式
Adaptable to any project
Electrical and Other Sample Characterization Modes
得益于众多的扫描模式和模块化设计,NX系列可轻易满足任何扫描探针显微项目的需求。
Park NX10 Specifications
Z Scanner
Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Resolution : 0.015 nm
Position detector noise : 0.03 nm (bandwidth: 1 kHz)
Resonant frequency : > 9 kHz (typically 10.5 kHz)
XY Scanner
Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution : 0.05 nm
Position detector noise : < 0.25 nm (bandwidth: 1 kHz)
Out-of-ne motion : < 2 nm (over 40 µm scan)
Stage
Z stage range : 25 mm
Focus travel range : 15 mm
XY stage travel range : 20 mm x 20 mm
Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g
Vision
10x (0.21NA) ultra-long working distance lens (1µm resolution)ive lens)
20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10×
CCD : 1 Mpixel, 5 Mpixel(optional)
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)
XEI
AFM data analysis software
Electronics
Signal processing
ADC : 18 channels
4 high-speed ADC channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels
Integrated functions
3 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control
External signal access
20ded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias